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Defect Detection on Rare Earth Garnets Grown by the Liquid Epitaxy Process

IP.com Disclosure Number: IPCOM000050896D
Original Publication Date: 1982-Dec-01
Included in the Prior Art Database: 2005-Feb-10
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Lo, J: AUTHOR [+2]

Abstract

Surface defects on transparent magnetic bubble films can be measured by directing light with a wavelength below 4,500 Angstroms at the bubble film whereby the defects show up as white spots on photographs of the reflected light. In a preferred embodiment, a blue filter is inserted in a standard semiconductor defect detection system. In another embodiment, a light source is selected so that the source transmits only light that would be reflected by the bubble film.

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Defect Detection on Rare Earth Garnets Grown by the Liquid Epitaxy Process

Surface defects on transparent magnetic bubble films can be measured by directing light with a wavelength below 4,500 Angstroms at the bubble film whereby the defects show up as white spots on photographs of the reflected light. In a preferred embodiment, a blue filter is inserted in a standard semiconductor defect detection system. In another embodiment, a light source is selected so that the source transmits only light that would be reflected by the bubble film.

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