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MLC Laser Sizing and Cutting Using Retrace

IP.com Disclosure Number: IPCOM000051084D
Original Publication Date: 1982-Aug-01
Included in the Prior Art Database: 2005-Feb-10
Document File: 2 page(s) / 38K

Publishing Venue

IBM

Related People

Chiaiese, VC: AUTHOR [+3]

Abstract

A CO(2) circulating gas laser, rated at 1.2 kW, and continuously discharging infrared laser radiation at a wavelength of 10.6 Mum, is used to cut multilayer "unfired" ceramic substrates. The laser beam has a diameter of 0.0254 cm (0.010 in.) and is stationary. The laminate, mounted on a vacuum chuck assembly, is indexed under the laser beam. The required substrate tolerances can be designed for X, Y dimensions and for feature to edge centrality.

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MLC Laser Sizing and Cutting Using Retrace

A CO(2) circulating gas laser, rated at 1.2 kW, and continuously discharging infrared laser radiation at a wavelength of 10.6 Mum, is used to cut multilayer "unfired" ceramic substrates. The laser beam has a diameter of 0.0254 cm
(0.010 in.) and is stationary. The laminate, mounted on a vacuum chuck assembly, is indexed under the laser beam. The required substrate tolerances can be designed for X, Y dimensions and for feature to edge centrality.

Various laser-cutting techniques are available to provide high qualities of cut edge profile and surface texture that are comparable to flat, vertical, sawed or milled edges.

Through the use of retrace, laser cut edge quality on MLC (multilayer ceramic) green laminates is improved.

An MLC green laminate is cut by the laser into oversize substrates. By indexing in 0.0304 cm (0.012 in.) on a side, the primary cut can be resurfaced to achieve a desirable cut edge quality. The following process parameters are used: 1. The Focal Point is defined on the vacuum chuck surface.

2. The Focal Depth is defined as the Focal Point 0.254 cm

(0.100 in.) above the vacuum chuck surface that

establishes it at mid-package for a 0.508 cm

(0.200 in.) thick laminate.

3. The nozzle tip has a 0.127 cm (0'050 in.) interior

diameter orifice.

4. Shield (cutting) gas pressure is at 70 psi through the

nozzle tip.

5. Primary cutting speed is at 218.4 cm (86 in.) per minute.

6. Retrace cutting speed is at 254 c...