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Laser Sizing System Vacuum Chuck

IP.com Disclosure Number: IPCOM000051096D
Original Publication Date: 1982-Aug-01
Included in the Prior Art Database: 2005-Feb-10
Document File: 2 page(s) / 65K

Publishing Venue

IBM

Related People

Chiaiese, VC: AUTHOR [+4]

Abstract

A CO(2) circulating gas laser, rated at 1.2 kW, and continuously discharging infrared laser radiation at a wavelength of 10.6 Mum, is used to cut multilayer "unfired" ceramic substrates. The laser beam has a diameter of 0.0254 cm (0.010 in.) and is stationary. The laminate, mounted on a vacuum chuck assembly, is indexed under the laser beam. The required substrate tolerances can be designed for X, Y dimensions and for feature to edge centrality.

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Laser Sizing System Vacuum Chuck

A CO(2) circulating gas laser, rated at 1.2 kW, and continuously discharging infrared laser radiation at a wavelength of 10.6 Mum, is used to cut multilayer "unfired" ceramic substrates. The laser beam has a diameter of 0.0254 cm
(0.010 in.) and is stationary. The laminate, mounted on a vacuum chuck assembly, is indexed under the laser beam. The required substrate tolerances can be designed for X, Y dimensions and for feature to edge centrality.

Various laser cutting techniques are available to provide high qualities of cut edge profile and surface texture that are comparable to flat, vertical, sawed or milled edges.

This system solves the problems of how to rough align, hold down, and protect MLC (multilayer ceramic) green laminates during laser-sizing operations.

Unlike most vacuum chucks used in the milling or sawing process, the vacuum chuck used in laser sizing must be open to allow the beam to pass through. Otherwise, the beam would cut the chuck, the particle blow back, and beam splash would disfigure the parts. A further requirement necessitated by the air shield that surrounds the beam, is that the air shield flow stay laminar for as long as possible beneath the laminate. This allows the molten material in the air shield to escape from the cutting area. In practical terms, this means that the bottom side of the chuck must be opened up gradually. There must be no sharp corners to cause turbulence.

The laser-sizing vacuum c...