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MLC Laser Sizing Gas Mix Optimization Formula

IP.com Disclosure Number: IPCOM000051105D
Original Publication Date: 1982-Aug-01
Included in the Prior Art Database: 2005-Feb-10
Document File: 1 page(s) / 12K

Publishing Venue

IBM

Related People

Chiaiese, VC: AUTHOR [+4]

Abstract

A CO(2) circulating gas laser, rated at 1.2 kW, and continuously discharging infrared laser radiation at a wavelength of 10.6 Vm, is used to cut multilayer "unfired" ceramic substrates. The laser beam has a diameter of 0.0254 cm (0.010 in.) and is stationary' The laminate, mounted on a vacuum chuck assembly, is indexed under the laser beam'

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MLC Laser Sizing Gas Mix Optimization Formula

A CO(2) circulating gas laser, rated at 1.2 kW, and continuously discharging infrared laser radiation at a wavelength of
10.6 Vm, is used to cut multilayer "unfired" ceramic substrates. The laser beam has a diameter of 0.0254 cm (0.010 in.) and is stationary'

The laminate, mounted on a vacuum chuck assembly, is indexed under the laser beam'

This laser-cutting technique can achieve qualities of cut edge profile and surface texture that are comparable to flat, vertical, sawed or milled edges.

This system facilitates laser stability and optimizes power and mode control (beam symmetry).

A laser system such as the Spectra Physics 1500 W can be modified with a general set of operating parameters for the gas mixture to provide an improved stable power level and good beam mode. The laser beam mode is the power density distribution within the laser beam. In order to cut green ceramic, the beam mode must be a circularly symmetrical Gaussian distribution.

The specific ratios of He, H(2) and CO(2) needed in the gas mixture to deliver a stable power level and good beam mode were established by trial and error. Small amounts of O(2) are also fed into the gas mixture, but 0(2) is a non-critical parameter and is used only to keep the inside of the cutting cavity clean.

The following settings are in terms of partial pressure.

He - 27.0 Torr 64.90 percent

N(2) - 13.0 31.25

CO(2)- 1.6 3.84

Total Pressure 41.6 Torr 100.00 percent.

The la...