Browse Prior Art Database

Thin Foil Automatic Mask Holder

IP.com Disclosure Number: IPCOM000051381D
Original Publication Date: 1981-Jan-01
Included in the Prior Art Database: 2005-Feb-10
Document File: 2 page(s) / 70K

Publishing Venue

IBM

Related People

Christensen, RG: AUTHOR

Abstract

A frame to hold flat and smooth a very thin foil mask (<.001" thick) is provided. As circuitry becomes more dense, much thinner masks are required in order to obtain smaller diameter holes and narrower line widths. The thinner the masks become, the more difficult they are to handle.

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Thin Foil Automatic Mask Holder

A frame to hold flat and smooth a very thin foil mask (<.001" thick) is provided. As circuitry becomes more dense, much thinner masks are required in order to obtain smaller diameter holes and narrower line widths. The thinner the masks become, the more difficult they are to handle.

The frame shown in Fig. 1 holds thin foil absolutely flat and protects it from damage. In addition, the frame has registration notches to permit close alignment tolerances of mask-to-substrate, the accuracy of which is within less than .01 mm.

As shown in Fig. 2, mask material 1 is flattened in a form die with the edges 11 of the material formed 90 degrees from the flat mask plane and screw clearance holes 13 pierced, all in the same die process step. A turned edge 11 is inserted over the fixed bar 3 in Fig. 1, tension material 7 is placed in position on the turned edge 11, and bar clamp 15 is screwed into position and tightened by screws 17.

The remaining three bars 5 are adjustable, and the same sequence of assembly steps is employed, first to the side opposite fixed bar 3. However, with each of the adjustable bars, tension is applied by loosening adjustable bar locking screws 9, rotating the adjustable bar until proper tension is applied, and then retightening locking screws 9. Tension is applied to each of the adjustable bars in the same manner.

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