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Producing Accurate Track Pitch and Width in Multielement Planar Ferrite Substrates Having Deposited Turns

IP.com Disclosure Number: IPCOM000051467D
Original Publication Date: 1981-Jan-01
Included in the Prior Art Database: 2005-Feb-10
Document File: 2 page(s) / 32K

Publishing Venue

IBM

Related People

Brock, GW: AUTHOR [+3]

Abstract

A method of forming a multielement ferrite head includes the steps of forming a ferrite substrate 1 with slots 2 that are glass filled, as illustrated in Fig. 1. The distance W(0) separating adjacent glass-filled slots represents a dimension slightly more than the desired track width. Mask sections 4 of photoresist or metal are formed by photolithography on the surface 3 of the ferrite structure 1, leaving the slots 2 exposed at the surface (Fig.2). The surface 3 is then etched, by chemical, ion beam, or sputter etching techniques, to remove ferrite and glass material so as the define the slots and thus form precise track widths W(f) between the slots (Fig. 3).

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Producing Accurate Track Pitch and Width in Multielement Planar Ferrite Substrates Having Deposited Turns

A method of forming a multielement ferrite head includes the steps of forming a ferrite substrate 1 with slots 2 that are glass filled, as illustrated in Fig.
1. The distance W(0) separating adjacent glass-filled slots represents a dimension slightly more than the desired track width. Mask sections 4 of photoresist or metal are formed by photolithography on the surface 3 of the ferrite structure 1, leaving the slots 2 exposed at the surface (Fig.2). The surface 3 is then etched, by chemical, ion beam, or sputter etching techniques, to remove ferrite and glass material so as the define the slots and thus form precise track widths W(f) between the slots (Fig. 3).

Thereafter, the surface 3 is coated (Fig. 4) with a ceramic 5, such as alumina, which is lapped flat to expose the ferrite surface (Fig. 5). Electrical coils are deposited on the substrate for interaction with the transducing gaps formed by the glass-filled slots.

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