Browse Prior Art Database

Wafer Chuck Adapter Plate for Wafer Handlers

IP.com Disclosure Number: IPCOM000051578D
Original Publication Date: 1981-Feb-01
Included in the Prior Art Database: 2005-Feb-10
Document File: 2 page(s) / 66K

Publishing Venue

IBM

Related People

Bohnenkamp, C: AUTHOR [+2]

Abstract

This adapter plate provides a fast and simple way of mounting and planarizing a wafer chuck to an existing movable stage. It can be incorporate in a high probe force mechanism because its design includes a large peripheral support.

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Wafer Chuck Adapter Plate for Wafer Handlers

This adapter plate provides a fast and simple way of mounting and planarizing a wafer chuck to an existing movable stage. It can be incorporate in a high probe force mechanism because its design includes a large peripheral support.

This wafer chuck adapter plate has a base 10 provided with a central aperture 12, holes 14 which receive bolts 16 for mounting the base on a suitable support, and an annular curved support surface 18. A movable plate 20 is supported on surface 18 and includes a downwardly projecting portion 22 bounded by a frustoconical surface 24, and holes 26 which receive bolts 28 adapted to mount a chuck or other support means thereon. Plate 20 includes an annular spherical surface 30 that is in contact with support surface 18. Adjusting screws 32 mounted in base 10 are adapted to contact frustoconical surface 24 on plate 20. It can be seen that the relative adjustment of screws 32 changes the position of plate 20 relative to base 10.

The transverse movement of plate 20 provides for locating the top surface of the base in various different planes relative to plate 20.

This provides for an easy and fast way of planarizing the plate 20 and any supporting chuck mounted thereon relative to apparatus that cooperates with the adapter plate, such as a tester or the like.

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