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Sintering of Powdered RuO(2) to Fabricate Electrode Structures

IP.com Disclosure Number: IPCOM000051697D
Original Publication Date: 1981-Feb-01
Included in the Prior Art Database: 2005-Feb-10
Document File: 1 page(s) / 12K

Publishing Venue

IBM

Related People

Sambucetti, CJ: AUTHOR [+2]

Abstract

The lifetime of a writing head is proportional to the length of the electrodes. Building up more than 5.10 mu m of active printing material such as RuO(2) by sputter deposition can be done, but cost effectiveness will be lost. A different way of fabricating more protruding (longer) electrode structures is described.

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Sintering of Powdered RuO(2) to Fabricate Electrode Structures

The lifetime of a writing head is proportional to the length of the electrodes. Building up more than 5.10 mu m of active printing material such as RuO(2) by sputter deposition can be done, but cost effectiveness will be lost. A different way of fabricating more protruding (longer) electrode structures is described.

The following two methods are possible: METHOD 1 a) Provide a substrate with through contacts. b) Apply a thick layer of photoresist either by spinning or by sheet application. The thickness of the resist depends on the required length of the electrodes. c) Expose and develop the resist by standard lithography techniques according to the desired electrode pattern. d) Squeeze RuO(2) powder into the openings. e) Irradiate the RuO(2) pattern with a focussed laser or high power electron beam by deflecting the beam or moving the structure on an x-y table. The power and pulse rate have to be adjusted to get proper sintering of the powder and to fuse it to the substrate. Since the electrode structure is rather simple, a mechanical x-y table provides a high throughput and should not limit production capacity. f) The photoresist which will polymerize at the hot interface can be removed by oxidation at a few hundred degrees without affecting the rest of the package, or it can be removed by solvents. METHOD 2
a) Same as Method 1. b) Apply a uniform layer of RuO powder to a thickness according to the...