Browse Prior Art Database

Self Aligning Universal Sample Holder

IP.com Disclosure Number: IPCOM000051755D
Original Publication Date: 1981-Mar-01
Included in the Prior Art Database: 2005-Feb-10
Document File: 2 page(s) / 88K

Publishing Venue

IBM

Related People

Koerner, RF: AUTHOR

Abstract

Disclosed is a sample holder (Figs. 1 and 2) having particular utility in contamination detection/analysis laboratory systems to provide standardized positioning of samples. Fixed pin notch alignment referenced to a crossed hairs ""home position'' simplifies precise manual or automated relocation of X-Y coordinates on succeeding equipment.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 100% of the total text.

Page 1 of 2

Self Aligning Universal Sample Holder

Disclosed is a sample holder (Figs. 1 and 2) having particular utility in contamination detection/analysis laboratory systems to provide standardized positioning of samples. Fixed pin notch alignment referenced to a crossed hairs ""home position'' simplifies precise manual or automated relocation of X-Y coordinates on succeeding equipment.

This holder is, in effect, a sophisticated wafer chuck with the following features: . Three-point spring-loaded alignment with convenient 57 mm through 125 mm wafer capability. . Corner stops and a swinging arm are provided for aligning and securing square or irregular samples up to 4.25" x 4.25" (108mm x 108 mm). . Compatible with high vacuum or ambient systems both in function and materials. . Typical vacuum chuck slits and a vacuum pencil/tweezer access slot are provided for versatility. . Interchangeable screw-mounted base adapters (not shown) permit installation and accurate alignment on most instrumentation.

1

Page 2 of 2

2

[This page contains 6 pictures or other non-text objects]