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AC Plasma Panel Fabrication

IP.com Disclosure Number: IPCOM000051780D
Original Publication Date: 1981-Mar-01
Included in the Prior Art Database: 2005-Feb-10
Document File: 1 page(s) / 12K

Publishing Venue

IBM

Related People

Altimari, R: AUTHOR [+3]

Abstract

In the fabrication of conventional AC plasma panels, conductor arrays are formed on glass plates and overcoated with a glass dielectric. This fabrication is relatively time-consuming and requires a significant capital investment. The conductors may be formed by evaporation or other techniques, but must be firmly connected to the glass plate at a high resolution, and must be composed of materials which are good conductors as well as providing a thermal match between the metallic conductors and the glass plate. Finally, the conductors must be resistant to attack by the glass dielectric during dielectric reflow.

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AC Plasma Panel Fabrication

In the fabrication of conventional AC plasma panels, conductor arrays are formed on glass plates and overcoated with a glass dielectric. This fabrication is relatively time-consuming and requires a significant capital investment. The conductors may be formed by evaporation or other techniques, but must be firmly connected to the glass plate at a high resolution, and must be composed of materials which are good conductors as well as providing a thermal match between the metallic conductors and the glass plate. Finally, the conductors must be resistant to attack by the glass dielectric during dielectric reflow.

A simplified method of providing the conductors and associated dielectric on a glass plate operates as follows: Aluminum metal between 5 and 10 microns thick is first deposited on the glass substrate and then etched by conventional photo-lithographic processes to provide discrete conductors on the plate. By anodizing the aluminum conductors, the resultant coating of aluminum oxide formed over the conductors constitutes the dielectric overcoat. The use of aluminum oxide as a dielectric eliminates the requirement for a further coating of a secondary emissive refractory material, such as magnesium oxide, which is normally utilized to protect the surface of the dielectric against ion bombardment. The aluminum conductors would be anodized to provide at least two microns of an anodic coating, and the aluminum-oxide coating is sealed by...