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Browse Prior Art Database

Flexible Multi Motion Planetary System for Vacuum Deposition

IP.com Disclosure Number: IPCOM000051833D
Original Publication Date: 1981-Mar-01
Included in the Prior Art Database: 2005-Feb-11
Document File: 2 page(s) / 46K

Publishing Venue

IBM

Related People

Albert, PA: AUTHOR [+3]

Abstract

In sputtering deposition from a three-source sputter gun system, it is important to provide a substrate motion that yields thickness uniformity of deposit under simultaneous action of one, two or three sources.

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Flexible Multi Motion Planetary System for Vacuum Deposition

In sputtering deposition from a three-source sputter gun system, it is important to provide a substrate motion that yields thickness uniformity of deposit under simultaneous action of one, two or three sources.

In the apparatus shown, the planetary system is driven from the top through the bell jar by means of a coupling 1 through a rotary seal 2. Four drive wheels 3 are coupled to a spider such that they turn freely but are free to drop into contact with a drive ring 5. The drive ring, in turn, is free to turn in a race 7 on bearings which also maintain its spacial position, and is driven (or held motionless) when desired by means of a drive sprocket 6 coupled to an appropriate ring incorporated into the drive ring. The substrate holders 8 are affixed to rods which, in turn, are held in the (hollow) shafts through the drive wheels 3 which are held in position by setscrews or compression rings. With sufficient clearance above the planetary fixture, or with shafts of different lengths, the substrate holders can be raised to just below the drive wheels or lowered to just clear the sources. The substrates can be positioned either on the drive wheel assemblies A or on the center position B if full planetary motion is not desired. A shield 9 attached to the center position with four holes for clearance of the planetary drives keeps the vacuum deposit out of the drive mechanism.

By driving only the spider and...