Original Publication Date: 1981-Apr-01
Included in the Prior Art Database: 2005-Feb-11
AbstractShown is a dome for vacuum evaporation systems.
Shown is a dome for vacuum evaporation systems.
This dome is non-cosine in construction due to height and overall outside dimensions, but is compatible with commercial systems. The design specifications for this dome are: 3rd tier wafer radius = 4.86 cosine = 4.978 delta= .118
2nd tier wafer radius = 7.99 cosine = 8.616 delta= .626
1st tier wafer radius =10.25 cosine = 12.017 delta=1.767
Dimensions in parenthesis are for a 35-position 57 mm dome.