Browse Prior Art Database

Evaporation Dome

IP.com Disclosure Number: IPCOM000051950D
Original Publication Date: 1981-Apr-01
Included in the Prior Art Database: 2005-Feb-11
Document File: 2 page(s) / 34K

Publishing Venue

IBM

Related People

Lennon, CG: AUTHOR

Abstract

Shown is a dome for vacuum evaporation systems.

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Evaporation Dome

Shown is a dome for vacuum evaporation systems.

This dome is non-cosine in construction due to height and overall outside dimensions, but is compatible with commercial systems. The design specifications for this dome are: 3rd tier wafer radius = 4.86 cosine = 4.978 delta= .118

2nd tier wafer radius = 7.99 cosine = 8.616 delta= .626

1st tier wafer radius =10.25 cosine = 12.017 delta=1.767

Dimensions in parenthesis are for a 35-position 57 mm dome.

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