Browse Prior Art Database

Crucible Pedestal to Prevent Heater Arcing

IP.com Disclosure Number: IPCOM000052158D
Original Publication Date: 1981-May-01
Included in the Prior Art Database: 2005-Feb-11
Document File: 2 page(s) / 54K

Publishing Venue

IBM

Related People

Murgai, A: AUTHOR

Abstract

An electrically insulating crucible pedestal is provided to prevent arcing. The arcing causes uncontrolled variations in melt temperature during large diameter Czochralski silicon crystal growth.

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Crucible Pedestal to Prevent Heater Arcing

An electrically insulating crucible pedestal is provided to prevent arcing. The arcing causes uncontrolled variations in melt temperature during large diameter Czochralski silicon crystal growth.

Silicon melt 1 is contained in silica crucible 2 which is retained in place by graphite sleeve 3 in graphite heater 4. Crucible 2 is supported by pedestal 5, which is rotated by steel shaft 6. Arcing between sleeve 3 and heater 4, which results in uncontrolled variations in heater power and silicon melt temperature, is avoided by forming pedestal 5 of boron-nitride.

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