Browse Prior Art Database

Sample Preparation Prior to Wet Processing

IP.com Disclosure Number: IPCOM000052509D
Original Publication Date: 1981-Jun-01
Included in the Prior Art Database: 2005-Feb-11
Document File: 2 page(s) / 37K

Publishing Venue

IBM

Related People

Sands, SA: AUTHOR

Abstract

Described is a method for the reduction and/or elimination of product defects caused by outgassing of process materials from porous surface structures, such as found on alumina ceramic substrates.

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Sample Preparation Prior to Wet Processing

Described is a method for the reduction and/or elimination of product defects caused by outgassing of process materials from porous surface structures, such as found on alumina ceramic substrates.

Prior to nickel plating and gold plating of molybdenum metallurgy on the multilayer ceramic (MLC), the substrate is immersed in an elevated temperature bath containing fluorocarbon liquid. The fluorocarbon will enter pores and displace process materials trapped from prior process operations, leaving clean pores that will not outgas during subsequent process steps causing blisters, blow-outs, etc.

If the parts are mounted in a rack, the rack can be put into such a bath as an added in-line process step, as shown in the drawing.

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