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E Gun Source Thermal Stabilizer

IP.com Disclosure Number: IPCOM000052692D
Original Publication Date: 1981-Jun-01
Included in the Prior Art Database: 2005-Feb-11
Document File: 2 page(s) / 22K

Publishing Venue

IBM

Related People

Slattery, WJ: AUTHOR

Abstract

In evaporating copper by means of an electron (E)-gun source, it is desirable to use a molybdenum crucible to hold the copper pellets in order to produce high quality defect-free copper film. However, the molybdenum material is a very good heat conductor, conducting a great deal of heat from the source to the water-cooled hearth, thus requiring a large power supply to maintain an acceptable evaporation rate of copper.

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E Gun Source Thermal Stabilizer

In evaporating copper by means of an electron (E)-gun source, it is desirable to use a molybdenum crucible to hold the copper pellets in order to produce high quality defect-free copper film. However, the molybdenum material is a very good heat conductor, conducting a great deal of heat from the source to the water-cooled hearth, thus requiring a large power supply to maintain an acceptable evaporation rate of copper.

This article describes a crucible assembly which reduces the power requirement to maintain an acceptable evaporation rate. As shown in the figure, a conventional water-cooled hearth is provided which is designated by the reference character 10, having a receiving well 12 formed therein. A molybdenum crucible 14 is provided which holds the copper pellets 16 which are to be evaporated by the E-gun. A thermal stabilizing liner 18, preferably formed of graphite or similar low thermal conducting, but good electrically conducting material, is provided which supports the crucible in the well 12. This will reduce significantly the power requirements to evaporate the copper pellets.

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