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Browse Prior Art Database

Low Particulate Generating Planetary Tooling

IP.com Disclosure Number: IPCOM000052904D
Original Publication Date: 1981-Jul-01
Included in the Prior Art Database: 2005-Feb-12
Document File: 2 page(s) / 81K

Publishing Venue

IBM

Related People

Lennon, CG: AUTHOR [+3]

Abstract

The elimination and reduction of particulate generation from planetary tooling (Fig. 1), a principal source of particulate contamination in semiconductor manufacturing, is a desirable requirement. The expansion of technology has brought increased requirements for cleanliness. Increased knowledge and new methods of achieving these requirements are needed to maintain and increase product yield.

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Low Particulate Generating Planetary Tooling

The elimination and reduction of particulate generation from planetary tooling (Fig. 1), a principal source of particulate contamination in semiconductor manufacturing, is a desirable requirement. The expansion of technology has brought increased requirements for cleanliness. Increased knowledge and new methods of achieving these requirements are needed to maintain and increase product yield.

This article describes techniques and an apparatus which are easily adaptable to this and other similar applications. These techniques can be inexpensively and practically implemented in a manufacturing line for any planetary- or epicycle-type tooling.

Redesign Techniques: a. Ring Track (Figs. 1 and 2) Extension of the inside race lip to act as a barrier shield to the evaporant. This prevents the evaporant from collecting on the bonnet wheels which later falls into the wheel race. Trace race and the wheel radius are matched (tracking), to prevent sinusoidal wheel path and more evenly distribute wheel contact along the race surface. The race finish is to be electropolished for smoothness in operation and to prevent rumble.
b. Wheels (Figs. 1 and 3) The radius of the wheel matches the wheel race (see ring track). The wheel finish is also to be electropolished. One-piece construction allows what evaporant that reaches the wheel to be continuous and not broken, and provides better adhesion qualities, lower manufacturing costs, weight ...