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Magnetic Linear Bearing and Positioning Stage in Clean Room Applications

IP.com Disclosure Number: IPCOM000059638D
Original Publication Date: 1986-Jan-01
Included in the Prior Art Database: 2005-Mar-08
Document File: 2 page(s) / 69K

Publishing Venue

IBM

Related People

Miller, DC: AUTHOR [+2]

Abstract

This article describes a magnetic linear bearing and the positioning stage for it in clean room applications whereby the contamination of clean air by rolling and sliding bearing surfaces and their lubrications are minimized. Automatic machine tools in clean room applications pose contamination problems due to rolling or sliding bearing surfaces and the lubricants on them. This problem will become more significant in the future because of the increasing use of automation and more stringent clean room requirements. The magnetic bearing disclosed herein provides a means of eliminating this source of contamination. Further, the application of positioning stages in clean rooms is a difficult proposition because of the contamination resulting from these bearing and way lubrications.

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Magnetic Linear Bearing and Positioning Stage in Clean Room Applications

This article describes a magnetic linear bearing and the positioning stage for it in clean room applications whereby the contamination of clean air by rolling and sliding bearing surfaces and their lubrications are minimized. Automatic machine tools in clean room applications pose contamination problems due to rolling or sliding bearing surfaces and the lubricants on them. This problem will become more significant in the future because of the increasing use of automation and more stringent clean room requirements. The magnetic bearing disclosed herein provides a means of eliminating this source of contamination. Further, the application of positioning stages in clean rooms is a difficult proposition because of the contamination resulting from these bearing and way lubrications. The positioning stage set forth herein is designed to eliminate this problem by utilizing the present non-contact magnetic linear bearing and a non-contact linear DC servo motor. The proposed bearing is modular in design and shown in the side section view of Fig. 1. It consists of a magnetic coupling, two magnetic bushings, one on each side of the coupling, and two guides, one on each end of the bearing. These modules are arranged axially along a guide tube, and each, except the guides, is made up of two magnetic ring assemblies, one on the inside and one on the outside of the guide tube (Section B-B, Fig. 2). The coupling has magnets on the inner and outer rings (Section C-C, Fig. 3) arranged with unlike poles facing each other to create attractive forces. Its purpose is to constrain both inner and outer ring assemblies to move in unison. The bushings have magnets on the inner and outer rings arranged with like poles facing each other to create radial repulsive forces. The bushings keep the outer assembly from contacting the guide tube. The inside assembly travels axially on the inside of the guide tube constrained radi...