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Simplified Scanning Tunnelling Microscope for Surface Topography Measurements

IP.com Disclosure Number: IPCOM000060194D
Original Publication Date: 1986-Mar-01
Included in the Prior Art Database: 2005-Mar-08
Document File: 2 page(s) / 46K

Publishing Venue

IBM

Related People

Demuth, JE: AUTHOR [+2]

Abstract

Scanning tunnelling microscopy (STM) is described by Binnig and Rohrer in Helv . Phys . Acta 55, 726 (1982). In such a system, it is important to provide a device which can control the gross (0-l") and fine (approximately 2000 ˜ movement of the sample up to the probe without severe vibration problems and possible damage to the probe. A simple and reliable mechanical drive is provided which has high vibrational stability and very accurate course and fine movement of the sample, to achieve STM with surface topographic/structural resolution at the 1 ˜ level. The sample drive assembly is shown above. The x,y,z, piezo drive assembly 10 has a fine probe tip 12 mounted to the piezos which is electronically controlled to "scan" the sample 14.

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Simplified Scanning Tunnelling Microscope for Surface Topography Measurements

Scanning tunnelling microscopy (STM) is described by Binnig and Rohrer in Helv . Phys . Acta 55, 726 (1982). In such a system, it is important to provide a device which can control the gross (0-l") and fine (approximately 2000 ~ movement of the sample up to the probe without severe vibration problems and possible damage to the probe. A simple and reliable mechanical drive is provided which has high vibrational stability and very accurate course and fine movement of the sample, to achieve STM with surface topographic/structural resolution at the 1 ~ level. The sample drive assembly is shown above. The x,y,z, piezo drive assembly 10 has a fine probe tip 12 mounted to the piezos which is electronically controlled to "scan" the sample 14. From the solid base of the piezo drive 16 which rigidly holds the piezos is mounted a foot 18 that protrudes over and approximately 0.001 - 0.002" beyond the probe tip. The composition of foot 18 is chosen for rigidity and compatibility with the sample. Its functions are to act as a pivot point and reference point to stabilize and fix the sample relative to the probe, also to act as a shield which protects the probe tip. Foot 18, together with the sample drive 20 shown in three positions (A,B,C), enables both the coarse and initial fine approach to the sample. The sample drive assembly 20 consists of a sample arm 22 which is free to pivot about a pin 24 in the advance arm 26 and spring loaded (spring 27) against a stop 28. Advance arm 26 is held by a linear z-motion (or z,y motion) stage/assembly (not shown) which is rigidly attached to the piezo drive assembly 10. This linear mo...