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Pressure-Monitoring System for Safety Oriented Control of Gases

IP.com Disclosure Number: IPCOM000060340D
Original Publication Date: 1986-Mar-01
Included in the Prior Art Database: 2005-Mar-08
Document File: 2 page(s) / 44K

Publishing Venue

IBM

Related People

Schiavone, FA: AUTHOR [+2]

Abstract

There is a widening use of toxic, hazardous gases associated with semiconductor manufacturing processes. This article describes an economic and secure method for monitoring the flow system carrying such gases so as to assure safe operations. In many installations, when there is an interruption of failure in the gas flow, a venting arrangement is used to relieve the system. This does not cease the flow of gas from the main source nor indicate the type of failure. The new development provides for an automatic shutdown of the gas flow, an alarm indicator, and a shutdown of the tool being furnished with the gas to avoid damage or contamination of the devices involved. A sketch of the monitoring system is given in the figure.

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Pressure-Monitoring System for Safety Oriented Control of Gases

There is a widening use of toxic, hazardous gases associated with semiconductor manufacturing processes. This article describes an economic and secure method for monitoring the flow system carrying such gases so as to assure safe operations. In many installations, when there is an interruption of failure in the gas flow, a venting arrangement is used to relieve the system. This does not cease the flow of gas from the main source nor indicate the type of failure. The new development provides for an automatic shutdown of the gas flow, an alarm indicator, and a shutdown of the tool being furnished with the gas to avoid damage or contamination of the devices involved. A sketch of the monitoring system is given in the figure. The gas tank source 1 is equipped with a closure valve 7 which may be either pneumatically operated or be an electrical solenoid valve. An electrical ascending pressure gauge 2 and a descending gauge 3 are appropriately located in concert with the pressure regulator 9. They are connected to an audible/visual alarm 4, a 12 V DC power supply 5 and a 12 V DC relay 6. If the pressure should exceed the preset level of the ascending gauge, the alarm will be energized and the relay will actuate controls (not shown) which will shut down the output valve of the tank as well as cut-off the tool being supplied from the tank. When the pressure in the tank drops to a preset value, the same sequen...