Browse Prior Art Database

Universal Wafer-Boat-Alignment Fixture

IP.com Disclosure Number: IPCOM000060419D
Original Publication Date: 1986-Apr-01
Included in the Prior Art Database: 2005-Mar-08
Document File: 2 page(s) / 49K

Publishing Venue

IBM

Related People

Clarke, GV: AUTHOR

Abstract

The Universal Wafer-Boat-Alignment Fixture allows any type of wafer-boat-handling apparatus to accommodate wafer boats of varying sizes without expensive replacement of the boat-alignment apparatus. As an example, this disclosure is based upon modification of a wafer elevator, but its applicability to any type of wafer-boat-handling apparatus will be readily apparent. Referring to Fig. 1, the wafer-boat-alignment fixture 10 comprises an L-shaped piece of material, metal or plastic. Notches 12 are cut into the surfaces of the fixture 10 for alignment of the edges of a wafer boat. Referring to Fig. 2 which is a top view of a wafer elevator platform 14, two alignment fixtures 10 are located on the elevator platform 14.

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Universal Wafer-Boat-Alignment Fixture

The Universal Wafer-Boat-Alignment Fixture allows any type of wafer-boat- handling apparatus to accommodate wafer boats of varying sizes without expensive replacement of the boat-alignment apparatus. As an example, this disclosure is based upon modification of a wafer elevator, but its applicability to any type of wafer-boat-handling apparatus will be readily apparent. Referring to Fig. 1, the wafer-boat-alignment fixture 10 comprises an L-shaped piece of material, metal or plastic. Notches 12 are cut into the surfaces of the fixture 10 for alignment of the edges of a wafer boat. Referring to Fig. 2 which is a top view of a wafer elevator platform 14, two alignment fixtures 10 are located on the elevator platform 14. A wafer boat (not shown) would stand vertically (coming out of the page) on this platform 14 and be constrained within the notches 12 of the alignment fixtures 10. To accommodate various sized boats, the spacing between pivot point 16 and notches 12 is variable to accommodate different sized boats. The fixtures 10 can easily be rotated about pivot point 16 and then fixed at the desired position, as necessary. Fig. 3 shows a side view of a wafer boat 18 standing atop elevator platform 14. Alignment fixtures 10 are shown as they engage the lips 20 of the wafer boat.

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