Browse Prior Art Database

Probe Alignment Aid

IP.com Disclosure Number: IPCOM000060423D
Original Publication Date: 1986-Apr-01
Included in the Prior Art Database: 2005-Mar-08
Document File: 2 page(s) / 34K

Publishing Venue

IBM

Related People

Allard, HC: AUTHOR [+3]

Abstract

This article describes an electrical shorting cross with probes in all four quadrants to detect "X", "Y", or theta misalignment of a wafer/ chip under test. To implement this technique of detecting and correcting the misalignment of an integrated circuit pattern under electrical test, a conductive (metal) cross that is accessible to probes must be added to the probe pattern to be tested. Furthermore, four quadrant probes must be added to the probe card. Through the utilization of a simple resistance check between probes by the controller, the direction of misalignment is detected and corrected. For example, if probes #1 and #2 or #3 and #4 are shorted, an "X" coordinate correction in either the negative or positive direction is sensed.

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Probe Alignment Aid

This article describes an electrical shorting cross with probes in all four quadrants to detect "X", "Y", or theta misalignment of a wafer/ chip under test. To implement this technique of detecting and correcting the misalignment of an integrated circuit pattern under electrical test, a conductive (metal) cross that is accessible to probes must be added to the probe pattern to be tested. Furthermore, four quadrant probes must be added to the probe card. Through the utilization of a simple resistance check between probes by the controller, the direction of misalignment is detected and corrected. For example, if probes #1 and #2 or #3 and #4 are shorted, an "X" coordinate correction in either the negative or positive direction is sensed. If probes #1 and #3 or #2 and #4 are shorted, a "Y" coordinate correction in either the positive or negative direction is sensed. If probes on the diagonal, i.e., #1 and #4 or #2 and #3 are shorted, a negative or positive theta rotation is sensed and the controller is directed to make the appropriate correction.

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