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Metallic Foil Pick-Up Fixture

IP.com Disclosure Number: IPCOM000060490D
Original Publication Date: 1986-Apr-01
Included in the Prior Art Database: 2005-Mar-08
Document File: 2 page(s) / 86K

Publishing Venue

IBM

Related People

MacKinnon, DA: AUTHOR [+3]

Abstract

It is necessary to handle very thin metallic masks and other elements in semiconductor manufacturing processes. The foil-like thicknesses of these masks are such that they are easily subject to damage when handled manually or with vacuum pencils. A tool has been invented which makes it possible to pick-up and move such items without damage. The tool consists of four vacuum cups 1 (Fig. 1), diametrically opposed with lateral movement 2 imparted to them by spring-loaded rods 3 actuated by a tapered cam 4 (Fig. 2). A bellows 5 is positioned at each end of a handle 6 with spring-loaded guides 7 and having a shaft 8 passing through a bushing 9 and connected to the cam 4. To operate the tool, the handle is squeezed and the bellows are deflated. The tool is placed onto the thin metal to be moved and the handle released.

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Metallic Foil Pick-Up Fixture

It is necessary to handle very thin metallic masks and other elements in semiconductor manufacturing processes. The foil-like thicknesses of these masks are such that they are easily subject to damage when handled manually or with vacuum pencils. A tool has been invented which makes it possible to pick- up and move such items without damage. The tool consists of four vacuum cups 1 (Fig. 1), diametrically opposed with lateral movement 2 imparted to them by spring-loaded rods 3 actuated by a tapered cam 4 (Fig. 2). A bellows 5 is positioned at each end of a handle 6 with spring-loaded guides 7 and having a shaft 8 passing through a bushing 9 and connected to the cam 4. To operate the tool, the handle is squeezed and the bellows are deflated. The tool is placed onto the thin metal to be moved and the handle released. This applies a low vacuum to the probes and extends them outward, applying a modest tension to the foil. The vacuum provides the pickup mechanism with the extended probes, holding the metal taut. When the handle is squeezed again, the vacuum is relieved and the metal placed wherever desired.

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