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Magnetic Field Enhanced Hydrogen Reactive Ion Etching of Metals

IP.com Disclosure Number: IPCOM000060617D
Original Publication Date: 1986-Mar-01
Included in the Prior Art Database: 2005-Mar-08
Document File: 1 page(s) / 8K

Publishing Venue

IBM

Related People

Hiraoka, H: AUTHOR [+3]

Abstract

Enhanced etch rates of hydrogen RIE of metals with a magnetic field applied have the advantages of no redeposition and no edge deterioration which usually accompany with argon ion sputtering. Besides, H2-RIE can operate at a higher pressure. Hydrogen should be mixed with helium in practical operations.

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Magnetic Field Enhanced Hydrogen Reactive Ion Etching of Metals

Enhanced etch rates of hydrogen RIE of metals with a magnetic field applied have the advantages of no redeposition and no edge deterioration which usually accompany with argon ion sputtering. Besides, H2-RIE can operate at a higher pressure. Hydrogen should be mixed with helium in practical operations.

Despite a smaller mass, hydrogen ion has a higher etch rate than helium ion, substantiating that a chemical reaction is taking place, not just a sputtering effect by hydrogen ion. A chemical effect is also obvious from outside surface roughness; with hydrogen ion, smooth surfaces of metal films unprotected with resist films become rough after a short exposure to hydrogen ion, but with helium, argon, or oxygen/CF4 for case with Ni-Fe films, smooth surfaces of metal remain unchanged for a same period of exposure, 30 minutes, for ion sputtering.

Although a chemical reaction of metals with hydrogen ions/ atoms is apparent, a 80 ~/min etch rate is not sufficiently high enough. In order to overcome this slow etch rate, a small magnetic field, 140 Gauss, is applied to the etching surfaces. The result is about 4-fold increase of the etch rates. The enhancement of the etch rates is a function of the magnetic field strength, and of the gap between the etching surface and magnet surfaces. With use of a stronger magnet, or by reducing the gap, much higher etch rates than the ones observed, 300 ~/min, with copper a...