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Polyethynylphenylether As a Planarizing Dielectric Layer

IP.com Disclosure Number: IPCOM000060620D
Original Publication Date: 1986-Mar-01
Included in the Prior Art Database: 2005-Mar-09
Document File: 1 page(s) / 12K

Publishing Venue

IBM

Related People

Peugh, HV: AUTHOR [+2]

Abstract

When diethynyldiphenylether is used as the only polyfunctional monomer, the resultant prepolymers are essentially polymeric ethynylphenylethers (PEPE).

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Polyethynylphenylether As a Planarizing Dielectric Layer

When diethynyldiphenylether is used as the only polyfunctional monomer, the resultant prepolymers are essentially polymeric ethynylphenylethers (PEPE).

In PEPE prepolymers, the thermally curable sites are linked to the polymer mass by an ether bond and are, therefore, more mechanically flexible than those directly attached. This built- in flexibility is carried over into the fully cured polymer and results in a less brittle thermally cured product. The polymer mass also contains ether linkages which contribute to better mechanical properties as well.

PEPE possesses excellent flow and planarization properties, and will result in excellent surface planarity and low peak to valley heights. Because of its chemical composition and high degree of aromaticity PEPE also has superior electrical and water impermeability properties.

A simple, reproducible one-step reaction to produce PEPE has been developed in which diethynyldiphenylether is cyclotrimerized with phenylacetylene as a capping group. Nickel 2,4-pentanedionate and triphenylphosphine are used as the catalyst system the reaction is run at an elevated temperature in dioxane as a solvent. The reaction can be monitored by infrared spectroscopy following the decrease in the ratio of the acetylene absorption to the aromatic absorption. When the desired molecular weight is reached, the reaction is cooled and the solution is worked up to remove the catalyst and to...