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Titanium Oxide Film

IP.com Disclosure Number: IPCOM000060624D
Original Publication Date: 1986-Mar-01
Included in the Prior Art Database: 2005-Mar-08
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Aboaf, JA: AUTHOR [+2]

Abstract

In some magnetic magnetoresistive heads using nickel-iron (NiFe) ferrite, the shunt material consists of a titanium layer. Unfortunately, when the NiFe is deposited directly on the titanium, the titanium and NiFe layers tend to interdiffuse. problem can be avoided by forming a titanium dioxide layer at the interface between the NiFe and the titanium.

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Titanium Oxide Film

In some magnetic magnetoresistive heads using nickel-iron (NiFe) ferrite, the shunt material consists of a titanium layer. Unfortunately, when the NiFe is deposited directly on the titanium, the titanium and NiFe layers tend to interdiffuse. problem can be avoided by forming a titanium dioxide layer at the interface between the NiFe and the titanium.

In processing, a titanium layer is formed on a ferrite substrate in a vacuum. The substrate is then exposed to an oxygen plasma which transforms an outer portion of the titanium layer to titanium dioxide. After formation of the TiO2 layer, the oxygen plasma is removed and a pure NiFe layer can be formed on the TiO2 layer.

Disclosed anonymously.

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