Browse Prior Art Database

Thermal Processing System

IP.com Disclosure Number: IPCOM000060760D
Original Publication Date: 1986-May-01
Included in the Prior Art Database: 2005-Mar-09
Document File: 2 page(s) / 43K

Publishing Venue

IBM

Related People

Behun, JR: AUTHOR [+2]

Abstract

In the manufacture of computer subassemblies, a unique thermal processing system can be used to improve control over temperature distribution, heating and cooling rates and cleanliness. The system comprises a processing container, a heating section in which heat is pumped to the sample container by the use of heat pipes, a cooling section in which heat is pumped away from the sample container also by use of heat pipes and an unloading station. The processing container serves as a loading platen, furnace body, and an environmental container for the part being processed and stays with the part throughout the entire processing cycle. In the figure, a typical thermal processing system is shown for chip manufacturing. Robot arm 1 loads the chips into the specially fabricated processing containers 2 which move along rails 3.

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Thermal Processing System

In the manufacture of computer subassemblies, a unique thermal processing system can be used to improve control over temperature distribution, heating and cooling rates and cleanliness. The system comprises a processing container, a heating section in which heat is pumped to the sample container by the use of heat pipes, a cooling section in which heat is pumped away from the sample container also by use of heat pipes and an unloading station. The processing container serves as a loading platen, furnace body, and an environmental container for the part being processed and stays with the part throughout the entire processing cycle. In the figure, a typical thermal processing system is shown for chip manufacturing. Robot arm 1 loads the chips into the specially fabricated processing containers 2 which move along rails 3. The processing containers then enter into safety enclosure 4 whereby the enclosure acts as a thermal barrier insulating the working environment from the processing reactions. The safety enclosure is self-contained and there is no need for operator entry. Within the enclosure 4 are heat pipes (not shown) which serve to heat and cool the containers and enclosed part thereby. After thermal processing, the container 2 exits the enclosure 4 and is then removed with the enclosed processed part to subsequent cleaning operation. This system provides considerable advantages in handling efficiency, processing time and versatility ov...