Browse Prior Art Database

Vacuum-Compatible Wafer Handler

IP.com Disclosure Number: IPCOM000060955D
Original Publication Date: 1986-Jun-01
Included in the Prior Art Database: 2005-Mar-09
Document File: 2 page(s) / 83K

Publishing Venue

IBM

Related People

Kulak, JE: AUTHOR [+3]

Abstract

A modification of a wafer-handling tool makes it possible to pick up and place semiconductor wafers from multiple vacuum-pumped ante-chambers into the main chamber of a vacuum-processing tool. The handling tool was previously limited to operating under atmospheric conditions. A key element of the device is the "frog leg" picker mechanism (Fig. 1). It has an extend/retract mechanism incorporating two sets of bars 4 which have the capability of being driven so as to move the wafer 1 to an extended position 2 or a retracted position 21 through the intermediate position 3 with 360-degree rotation. The tool was modified by placing the motion mechanism into the vacuum chamber with the drive mechanism in atmosphere. The parts specifically used from the original tool (Fig.

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Vacuum-Compatible Wafer Handler

A modification of a wafer-handling tool makes it possible to pick up and place semiconductor wafers from multiple vacuum-pumped ante-chambers into the main chamber of a vacuum-processing tool. The handling tool was previously limited to operating under atmospheric conditions. A key element of the device is the "frog leg" picker mechanism (Fig. 1). It has an extend/retract mechanism incorporating two sets of bars 4 which have the capability of being driven so as to move the wafer 1 to an extended position 2 or a retracted position 21 through the intermediate position 3 with 360-degree rotation. The tool was modified by placing the motion mechanism into the vacuum chamber with the drive mechanism in atmosphere. The parts specifically used from the original tool (Fig.
2) include modified drive circuitry, the picker mechanism, azimuth feedback sensor 5, and the driver and sensor mechanism 6. A hollow bore rotary vacuum feedthrough 7 is used to mount the picker mechanism 22 into the vacuum chamber 8. A vacuum seal support assembly provides a platform support for two rotary vacuum shaft seals 11, only one being shown. These seals are critical to the proper performance of the modified device. The support assembly also supports shaft extensions 12, couplings 13, azimuth drive gear 14, brackets 15, 16 and the drive mechanism 6. A clamp 7a, which is part of feedthrough 7, holds the support assembly 9, 10 in place, which allows the picker to...