Browse Prior Art Database

Non-destructive Probe for Resistivity Measurements

IP.com Disclosure Number: IPCOM000061140D
Original Publication Date: 1986-May-01
Included in the Prior Art Database: 2005-Mar-09
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Lorber, HW: AUTHOR [+4]

Abstract

An electrolyte filled felt tip penlike probe allows the testing of semiconductor devices without damage to the probed area.

This text was extracted from a PDF file.
This is the abbreviated version, containing approximately 100% of the total text.

Page 1 of 1

Non-destructive Probe for Resistivity Measurements

An electrolyte filled felt tip penlike probe allows the testing of semiconductor devices without damage to the probed area.

The probe per se- consists of a very fine felt-tipped probe saturated with an electrolyte, which is chosen to be chemically non-reactive with the device materials. A suitable electrolyte is 1 molar of K2HP04, which has a moderate surface tension and a low resistance.

The use of a soft probe reduces the susceptibility to damage caused by hand probe tips such as tungsten carbide and high contact pressures necessary to achieve a low ohmic contact with the test area. The electrolyte wets the test area so as to achieve the necessary low contact resistance while preserving the integrity of the shallow diffusion layers.

A typical test setup is shown schematically in the drawing. Four pens 10, 11, 12 and 13 are deployed in a linear array as shown with a current I applied across the outer pens 10 and 13. The voltage V is measured across the two inner pens 11 and 12 giving rise to the following relationships: V _ p (ohms-cm) = I 2fS where S = spacing between probes in cm I = driving current V = measured voltage ps (ohms/square) = V f _ _ I Ln2 wherein s = the sheet resistance and Ln = natural logarithm.

The use of the probes in this configuration permits measurement of sheet resistance greater than 1000 ohms/squ

Disclosed anonymously.

1