Browse Prior Art Database

Mask Assembly and Wafer Tray

IP.com Disclosure Number: IPCOM000061258D
Original Publication Date: 1986-Jul-01
Included in the Prior Art Database: 2005-Mar-09
Document File: 2 page(s) / 50K

Publishing Venue

IBM

Related People

Cook, LG: AUTHOR [+4]

Abstract

Semiconductor wafers and photolithographic mask assemblies are subject to particulate contamination and operator damage during storage and handling, which can cause the wafer or mask assembly to be rejected. An improved carrier tray has substantially reduced the number of defects caused by handling and particulate contamination. Mask assemblies, which typically include a photolithographic mask in contact with a wafer, a bias spring, retaining rings, and clips, were previously stored in a substantially vertical position in a rack. The assemblies were prone to contamination by airborne particulates and were difficult for operators to insert and remove.

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Mask Assembly and Wafer Tray

Semiconductor wafers and photolithographic mask assemblies are subject to particulate contamination and operator damage during storage and handling, which can cause the wafer or mask assembly to be rejected. An improved carrier tray has substantially reduced the number of defects caused by handling and particulate contamination. Mask assemblies, which typically include a photolithographic mask in contact with a wafer, a bias spring, retaining rings, and clips, were previously stored in a substantially vertical position in a rack. The assemblies were prone to contamination by airborne particulates and were difficult for operators to insert and remove. Referring to the photograph, the present tray 1, which may be formed of molded plastic, includes a number of circular recessed areas into which mask assemblies 2 may be inserted face down. Additional recessed areas 3 are provided at the periphery of the circular recesses to permit manual insertion or removal by an operator without touching the face of the mask. The tray 1 can be carried by the molded handles 4 at each end, and a peripheral ridge 5 and flat 6 allow a number of trays to be stacked. Wafers may also be transported in the trays. Small bumps (not shown) in the bottom of each circular recess support the wafer which can be lifted into or out of the tray 1 with a vacuum pencil.

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