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Method of Fabricating Deflection Coils for Electron Lithography Systems

IP.com Disclosure Number: IPCOM000061297D
Original Publication Date: 1986-Jul-01
Included in the Prior Art Database: 2005-Mar-09
Document File: 1 page(s) / 12K

Publishing Venue

IBM

Related People

Coane, PJ: AUTHOR [+3]

Abstract

The use of multilayer ceramic (MLC) techniques is proposed for fabricating deflection coils for electron beam lithography machines. Preformed unfired ceramic sheets with metallization patterns, applied as a conductive paste by a silk screen process, are stacked together and fired to form an accurately defined monolithic deflection coil assembly, which is compact and mechanically stable. Conductor positions cannot move relative to each other due to thermal expansion or otherwise. Cooling channels also could be provided through the assembly. Deflection coil assemblies are typically wound with copper wire on insulating coil forms. In order to maintain uniformity of the deflection field and the orthogonality of X-Y axes, precise tolerances are required.

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Method of Fabricating Deflection Coils for Electron Lithography Systems

The use of multilayer ceramic (MLC) techniques is proposed for fabricating deflection coils for electron beam lithography machines. Preformed unfired ceramic sheets with metallization patterns, applied as a conductive paste by a silk screen process, are stacked together and fired to form an accurately defined monolithic deflection coil assembly, which is compact and mechanically stable. Conductor positions cannot move relative to each other due to thermal expansion or otherwise. Cooling channels also could be provided through the assembly. Deflection coil assemblies are typically wound with copper wire on insulating coil forms. In order to maintain uniformity of the deflection field and the orthogonality of X-Y axes, precise tolerances are required. The coil form is machined from a single piece of material, such as ABS plastic or machinable glass. Slots are provided for the positioning of the individual turns of wire and special fixtures are used for placement of the wire. As the number of turns is increased, the assembly becomes more difficult to build and variations in the uniformity of the deflection field can result. Additional field distortions occur as the coil is electrically cycled and heat is generated within the structure. The dimensions of the coil and the relative positions of the individual turns of wire also can change, independently causing non-repeatable, time-dependent drift...