Browse Prior Art Database

Decal Fabrication Using a Parylene Substrate

IP.com Disclosure Number: IPCOM000061400D
Original Publication Date: 1986-Jun-01
Included in the Prior Art Database: 2005-Mar-09
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Freely, JD: AUTHOR [+5]

Abstract

The use of parylene as the substrate in decal fabrication allows for improved production yield and reduces defects because of its high purity, good water absorption properties and superior physical properties.

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Decal Fabrication Using a Parylene Substrate

The use of parylene as the substrate in decal fabrication allows for improved production yield and reduces defects because of its high purity, good water absorption properties and superior physical properties.

The parylene substrate can be fabricated from sheets of parylene as commercially available or can be evaporated on a bare silicon layer to the desired thickness according to the following steps: 1. Select wafers and inspect for particulate contamination. 2. Sulphuric-Nitric acid clean - 10 minutes. 3. Place silicon wafer in fixtures and vacuum deposit parylene on bare silicon wafer for thirty-five minutes.

Deposition of the metal conductors on the parylene substrate is then performed as conventionally done.

Disclosed anonymously.

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