Browse Prior Art Database

Chrome Surface Contamination Standard

IP.com Disclosure Number: IPCOM000061862D
Original Publication Date: 1986-Aug-01
Included in the Prior Art Database: 2005-Mar-09
Document File: 1 page(s) / 12K

Publishing Venue

IBM

Related People

Schmidt, DA: AUTHOR

Abstract

A technique is described which will produce a semiconductor photomask surface contamination and defect standard in the 0.5 um to 1.0 um range for use as a calibration tool for photomask particle detection systems. The standard may be cleaned and reused many times without deterioration.

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Chrome Surface Contamination Standard

A technique is described which will produce a semiconductor photomask surface contamination and defect standard in the 0.5 um to 1.0 um range for use as a calibration tool for photomask particle detection systems. The standard may be cleaned and reused many times without deterioration.

In order to insure that a particle detection system is working properly and capable of detecting and locating coordinates of particles on chrome and glass surfaces, a calibration tool is needed which will cause the particle detec system output to reproduce particle count, relative particle size and distribution of a known histogram format. Surface contamination monitors currently in use are either photomasks coated with resist defects or latex spheres and can not be cleaned without deterioration of the simulated contamination.

A photomask particle detection system may be calibrated with a standard photomask that takes advantage of the polarizing and light scattering properties of chrome to simulate contamination particles. A durable control standard may be fabricated by evaporating and sputtering a layer of chrome on a resist covered chrome substrate photomask patterned with small holes of various sizes in an ordered fashion. Families of holes, when processed into a contamination standard photomask at known coordinates, will allow a particle detection system output to produce a defect map exactly like the monitor photomask. The deposited chrome...