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Fabricating Independent Images With an Aspect Ratio of Less Than 1 On Metal Foils

IP.com Disclosure Number: IPCOM000061891D
Original Publication Date: 1986-Jul-01
Included in the Prior Art Database: 2005-Mar-09
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Kordus, M: AUTHOR [+3]

Abstract

A three layer two-metal configuration with the outside layers being of the same material can be used to fabricate images with an aspect ratio of less than 1. The principle behind this is that each layer is independently etched by some given means to produce a hole through the material that is not as wide as the three layers are thick.

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Fabricating Independent Images With an Aspect Ratio of Less Than 1 On Metal Foils

A three layer two-metal configuration with the outside layers being of the same material can be used to fabricate images with an aspect ratio of less than
1. The principle behind this is that each layer is independently etched by some given means to produce a hole through the material that is not as wide as the three layers are thick.

To make the mask the metal will be coated with a photoresist and patterned as shown in Fig. 2. Layers 1 and 2 will then be etched by some chemical means using the photoresist as protection for layers 1 and 2. Once layers 1 and 2 have been etched (Fig. 3), the resist can be stripped and the core layer can then be etched by some means which will not attack layers 1 and 2. The resulting structure will have a straight walled look as in Fig. 4. The mask will be held together by the remaining metal and metal tabs.

The types of metal to be used and the ratio of thicknesses between the layers can be varied to control etch rates.

Disclosed anonymously.

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