Browse Prior Art Database

A Novel Silicon Dioxide Characterization Device Which Uses Phosphor Luminescence

IP.com Disclosure Number: IPCOM000061947D
Original Publication Date: 1986-Aug-01
Included in the Prior Art Database: 2005-Mar-09
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Alexander, SL: AUTHOR

Abstract

The location and size of defects in a silicon dioxide film can be detected through the use of an electroluminescent layer. Referring to the figure, a layer of silicon dioxide 10 is grown silicon substrate 12. On top of the silicon dioxide layer 10, a thin film 14 of a suitably doped phosphor, such as ZnS with Cu and Cl, is deposited, followed by a thin, optically transparent metallic layer 16 (i.e., silver, gold, etc.).

This text was extracted from a PDF file.
This is the abbreviated version, containing approximately 100% of the total text.

Page 1 of 1

A Novel Silicon Dioxide Characterization Device Which Uses Phosphor Luminescence

The location and size of defects in a silicon dioxide film can be detected through the use of an electroluminescent layer. Referring to the figure, a layer of silicon dioxide 10 is grown silicon substrate 12. On top of the silicon dioxide layer 10, a thin film 14 of a suitably doped phosphor, such as ZnS with Cu and Cl, is deposited, followed by a thin, optically transparent metallic layer 16 (i.e., silver, gold, etc.).

A potential is applied across the sandwiched layers. Any defects in the silicon dioxide film 10 which cause leakage currents will now serve as electron sources for the phosphor film 14. These electrons will cause excitation of the phosphors and a resulting electroluminescent discharge.

A suitable magnification unit 18 serves to increase the apparent defect images so that manual observation is possible. The light signal is then sent to a photodetector array 20 which converts the intensity into a current signal. This current signal can then be used to determine the defect size by using an appropriate mathematical relationship.

Disclosed anonymously.

1