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Fabrication of Relief-free Electrical Patterns Using High Intensity Lasers

IP.com Disclosure Number: IPCOM000061963D
Original Publication Date: 1986-Aug-01
Included in the Prior Art Database: 2005-Mar-09
Document File: 1 page(s) / 12K

Publishing Venue

IBM

Related People

Chen, M: AUTHOR [+3]

Abstract

When a suitable matrix hosting islands or particles of a metallic species strongly absorbs the extremely large photon fluxes that a high power laser can deliver in very short times (typically nanoseconds), the absorption process leads to a large temperature gradient between the top surface layers where most of the absorption occurs and the bulk of the material. This results in the segregation of the elemental absorber within the thin solid film. When the concentration of the absorber and matrix material and the illumination of the exposed area are correctly chosen, this segregation phenomenon leads to the formation of electrically conducting structures without relief formation. Micron structures can therefore be attained by illuminating the desired material via a lithographic mask.

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Fabrication of Relief-free Electrical Patterns Using High Intensity Lasers

When a suitable matrix hosting islands or particles of a metallic species strongly absorbs the extremely large photon fluxes that a high power laser can deliver in very short times (typically nanoseconds), the absorption process leads to a large temperature gradient between the top surface layers where most of the absorption occurs and the bulk of the material. This results in the segregation of the elemental absorber within the thin solid film. When the concentration of the absorber and matrix material and the illumination of the exposed area are correctly chosen, this segregation phenomenon leads to the formation of electrically conducting structures without relief formation. Micron structures can therefore be attained by illuminating the desired material via a lithographic mask.

There is thus provided laser projection printing of microcircuit patterns on phase segregated compounds which can be utilized to create conducting planar structures performing functions where a change in the electrical properties of the medium is required but relief features may be undesirable.

Experiments were performed utilizing the output of a KrF excimer laser at 259 nm, a 4 x projection lens and a chrome-on- quartz lithographic mask. A 2.5 x 2.5 mm2 pattern was printed using a single 12 x 10-9 second laser pulse whose energy was set at 2.0 x 10-3 J/pulse. A micropattern was generated via phase segregation o...