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Removable Pellicle for Photomask

IP.com Disclosure Number: IPCOM000061983D
Original Publication Date: 1986-Sep-01
Included in the Prior Art Database: 2005-Mar-09
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Peredy, S: AUTHOR

Abstract

Pellicle frame attachment to a mask is accomplished by spring clips instead of glue, thus facilitating disassembly for mask repair and/or cleaning.

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Removable Pellicle for Photomask

Pellicle frame attachment to a mask is accomplished by spring clips instead of glue, thus facilitating disassembly for mask repair and/or cleaning.

Referring to Fig. 1, four plastic spring clips 2 clamp the pellicle frame 4 in position on the mask 6. Fig. 2 is an enlarged edge view providing more detail of spring clip 2, whic bonded to pellicle frame 4, and may be sprung open sufficiently that frame 4 (with its four spring clips 2) can be attached to or removed from mask 6.

This method of pellicle frame attachment obviates the damage and/or contamination problems associated with removal of glued pellicle frames when mask repair or cleaning is required.

Disclosed anonymously.

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