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Browse Prior Art Database

Greensheet Distortion Compensator

IP.com Disclosure Number: IPCOM000062116D
Original Publication Date: 1986-Oct-01
Included in the Prior Art Database: 2005-Mar-09
Document File: 2 page(s) / 58K

Publishing Venue

IBM

Related People

Benzell, RA: AUTHOR [+4]

Abstract

Distortions may occur in the punching of holes in glass ceramic green sheets used for semiconductor devices. A method has been proposed to pre-distort the hole pattern prior to punching so that a compensatory effect is achieved which will offset the distortion resulting as a result of the punching action used to make the holes. Greater distortions are experienced when punching and processing large green sheets with denser patterns and smaller via holes. In the punching process the desire is to achieve a pattern Fig. 1-1 without any distortion. Under the usual conditions, an uncompensated distorted pattern 2 may result following punching. The proposal would alter the pattern 3 prior to punching by means of a compensated program. The final pattern 4 achieved after punching would match that in the original design 1.

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Greensheet Distortion Compensator

Distortions may occur in the punching of holes in glass ceramic green sheets used for semiconductor devices. A method has been proposed to pre-distort the hole pattern prior to punching so that a compensatory effect is achieved which will offset the distortion resulting as a result of the punching action used to make the holes. Greater distortions are experienced when punching and processing large green sheets with denser patterns and smaller via holes. In the punching process the desire is to achieve a pattern Fig. 1-1 without any distortion. Under the usual conditions, an uncompensated distorted pattern 2 may result following punching. The proposal would alter the pattern 3 prior to punching by means of a compensated program. The final pattern 4 achieved after punching would match that in the original design 1. The sequence of the proposed method is given in Fig. 2. The deviation between the design pattern and the punch-distorted pattern would be measured via coordinates. A compensation factor would then be calculated for each coordinate. The flex punch would be adjusted to use these factors to produce the altered, pre-distorted punch pattern which would then be used to punch the sheet. The altered pattern would be stored on a permanent database along with the sheet's part and reference numbers. In this manner it is then possible to retrieve the sheet pattern when desired without the need to recalculate the compensation factors...