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Uhv-Compatible Xyzrd-Manipulator With Heating and Cooling Capabilities

IP.com Disclosure Number: IPCOM000062190D
Original Publication Date: 1986-Oct-01
Included in the Prior Art Database: 2005-Mar-09
Document File: 2 page(s) / 62K

Publishing Venue

IBM

Related People

Ott, HP: AUTHOR [+3]

Abstract

The transport of a species in an ultra-high vacuum environment is a general problem in many areas, e.g., in the manufacture of semiconductor devices, and in surface science. This manipulator combines a highly reproducible xyz-translational movement with polar and azimuthal rotation about angles down to less than one-half of a degree. Carried by the rail 1 of an xyzR transfer device is a pignon 2 which is rotatably supported about the D-axis. A toothed rack 3 is slidably arranged on one side of the rail 1 with its teeth engaging the teeth of pignon 2. Back-and-forth movement of rack 3 thus causes the pignon 2 to rotate.

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Uhv-Compatible Xyzrd-Manipulator With Heating and Cooling Capabilities

The transport of a species in an ultra-high vacuum environment is a general problem in many areas, e.g., in the manufacture of semiconductor devices, and in surface science. This manipulator combines a highly reproducible xyz- translational movement with polar and azimuthal rotation about angles down to less than one-half of a degree. Carried by the rail 1 of an xyzR transfer device is a pignon 2 which is rotatably supported about the D-axis. A toothed rack 3 is slidably arranged on one side of the rail 1 with its teeth engaging the teeth of pignon 2. Back-and-forth movement of rack 3 thus causes the pignon 2 to rotate. Rigidly mounted to pignon 2 is a plate 4 which carries, on a pair of insulating washers 5a, 5b a divided sample holder 6a, 6b the parts of which are mutually insulated but thermically connected by means of a sapphire 7 arranged in between. Clamps 8, 9 secure a divided sample carrier 10a, 10b to the sample holder 6a, 6b, with parts of the carrier 10a, 10b matching those of the holder 6a, 6b. The sample 11 is arranged on top of the sample carrier 10a, 10b. A first flexible copper cable 12 is connected to one part 6a of the sample holder 6a, 6b and may serve as a heat-sink connection and as a current lead. A second flexible copper cable 13 is connected to the other part 6b of the sample holder. Thus, it is possible to cool sample 11 by removing heat via said first cable 12, and to...