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Shaped Droplet Deposition Technique

IP.com Disclosure Number: IPCOM000062196D
Original Publication Date: 1986-Oct-01
Included in the Prior Art Database: 2005-Mar-09
Document File: 2 page(s) / 21K

Publishing Venue

IBM

Related People

Greschner, J: AUTHOR [+3]

Abstract

Multi-arc cathode 1 produces microdroplets 2 that are doped in unit 3. When passing electrodes 5, the doped droplets 4 are polarized, depending upon their doping. As a result, the magnitude of the surface tension is determined, so that the electric field between the electrodes 5 changes the shape of droplets 6 as a function of their doping, thus permitting layers of different width and thickness to be deposited on substrate 7 moved by means of a cross-slide.

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Shaped Droplet Deposition Technique

Multi-arc cathode 1 produces microdroplets 2 that are doped in unit 3. When passing electrodes 5, the doped droplets 4 are polarized, depending upon their doping. As a result, the magnitude of the surface tension is determined, so that the electric field between the electrodes 5 changes the shape of droplets 6 as a function of their doping, thus permitting layers of different width and thickness to be deposited on substrate 7 moved by means of a cross-slide.

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