Browse Prior Art Database

Improved Plasma Reactor Design

IP.com Disclosure Number: IPCOM000062237D
Original Publication Date: 1986-Oct-01
Included in the Prior Art Database: 2005-Mar-09
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Herrmann, WF: AUTHOR [+3]

Abstract

In present plasma reactors, gas enters the reactor through one or more ports, and it is assumed that the gas will distribute itself throughout the reactor.

This text was extracted from a PDF file.
This is the abbreviated version, containing approximately 100% of the total text.

Page 1 of 1

Improved Plasma Reactor Design

In present plasma reactors, gas enters the reactor through one or more ports, and it is assumed that the gas will distribute itself throughout the reactor.

The manner in which gas distributes itself in a reactor affects the uniformity of the plasma reaction throughout the reactor.

Improved uniformity could be achieved by an improved means of distributing the gas in the reactor. An improved gas flow in the reactor can be achieved by distributing the gas through holes in the electrodes. The hole pattern in the electrodes should be such as to allow concentration of the reactive species over the specific areas to be etched. The reactive species can be channeled to specific areas where they are nee

The net result is a substantial improvement in uniformity.

Disclosed anonymously.

1