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Browse Prior Art Database

Improved Rotary High Vacuum Valve

IP.com Disclosure Number: IPCOM000062241D
Original Publication Date: 1986-Oct-01
Included in the Prior Art Database: 2005-Mar-09
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Mantilla, OA: AUTHOR [+2]

Abstract

Rotary high-vacuum gate valves use a thin layer of gas to separate a rotating valve member from a stationary member. bearing vacuum valves rely on the conductance of the very small separation between members (i.e., the ability of gas to flow through a small slot) to seal a high vacuum chamber from room environment.

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Improved Rotary High Vacuum Valve

Rotary high-vacuum gate valves use a thin layer of gas to separate a rotating valve member from a stationary member. bearing vacuum valves rely on the conductance of the very small separation between members (i.e., the ability of gas to flow through a small slot) to seal a high vacuum chamber from room environment.

In a vacuum chamber the input/output device has two gas bearing vacuum valves. It has been found that if a vacuum drain channel is positioned between the gas bearing working area and the vacuum chamber opening, the conductance of the separation between members is lowered, thus permitting higher vacuum levels in the chamber.

In a high vacuum system which includes four gas-bearing, high-vacuum gate valves, each of which has a separation of 1.3 microns, a 3000 liter/second cryopump evacuating a 140 liter chamber maintains 2.OE-7 torr while the gate valves mentioned above are operated. Tests conducted with the same vacuum system using a single valve yielded vacuum levels of 6.OE-8 torr.

Disclosed anonymously.

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