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Protective Coating for Wirebonding Tips

IP.com Disclosure Number: IPCOM000062259D
Original Publication Date: 1986-Oct-01
Included in the Prior Art Database: 2005-Mar-09
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Chalco, PA: AUTHOR [+2]

Abstract

Tungsten wirebonding tips subjected to high temperature such as lasers, can be given extended life by forming a tungsten silicide coating on the tip surfaces.

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Protective Coating for Wirebonding Tips

Tungsten wirebonding tips subjected to high temperature such as lasers, can be given extended life by forming a tungsten silicide coating on the tip surfaces.

Referring to the FIGURE, a pair of tungsten bonding tips 1 are given a coating 2 of sputtered silicon. The coated tips are annealed at about 1000oC in a high vacuum or inert atmosphere to allow interdiffusion of silicon and tungsten to form tungsten silicide. This coating prevents subsequent diffusion of oxygen into the tip material and adheres well to prevent coating damage during thermal cycling.

Disclosed anonymously.

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