Browse Prior Art Database

Evaporation Material Dispenser

IP.com Disclosure Number: IPCOM000062272D
Original Publication Date: 1986-Nov-01
Included in the Prior Art Database: 2005-Mar-09
Document File: 2 page(s) / 54K

Publishing Venue

IBM

Related People

Busacco, RA: AUTHOR

Abstract

A control shutter of a vacuum evaporator can be fitted with a dispenser to enable loading a crucible with an auxiliary charge of source material during a single vacuum pump-down. This arrangement simplifies evaporator construction and affords time saving when depositing multiple coatings. Referring to Fig. 1, the dispenser comprises base plate 1 mountable on a control shutter and having dispensing tube 2 extending therethrough. Release arm 3, pivoted about pin 4, has curved end 5 that enters slot 6 to block a charge of source material loaded in the tube top and covered with cap 7. A compression spring 8 frictionally prevents unwanted motion of the arm when the shutter is moved. The dispenser is preferably of non-magnetic stainless steel. An embodiment of the dispenser mounting and control is shown in Figs.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 60% of the total text.

Page 1 of 2

Evaporation Material Dispenser

A control shutter of a vacuum evaporator can be fitted with a dispenser to enable loading a crucible with an auxiliary charge of source material during a single vacuum pump-down. This arrangement simplifies evaporator construction and affords time saving when depositing multiple coatings. Referring to Fig. 1, the dispenser comprises base plate 1 mountable on a control shutter and having dispensing tube 2 extending therethrough. Release arm 3, pivoted about pin 4, has curved end 5 that enters slot 6 to block a charge of source material loaded in the tube top and covered with cap 7. A compression spring 8 frictionally prevents unwanted motion of the arm when the shutter is moved. The dispenser is preferably of non-magnetic stainless steel. An embodiment of the dispenser mounting and control is shown in Figs. 2 and 3, which illustrates the top view of a double evaporator used to deposit three layers. Dispenser base plate 1 is secured to control shutter 20 with charge tube 2 extending through the shutter toward a first crucible 9, shown in phantom, directly below. Extension lever 10 is secured to release arm 3 and rests in recess 11 of an actuator plate 12 affixed to control shutter 13 above a second crucible 14, also in phantom. Both shutters 20 and 13 are mounted on respective support rods 15 and 16, each selectively rotatable about its pivot 17. As an example of operation, assume work pieces in the evaporator are to receive successiv...