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Determination of Lateral and Energy Resolution in Small-Spot ESCA Spectrometers

IP.com Disclosure Number: IPCOM000062424D
Original Publication Date: 1986-Nov-01
Included in the Prior Art Database: 2005-Mar-09
Document File: 1 page(s) / 12K

Publishing Venue

IBM

Related People

Gerken, F: AUTHOR [+2]

Abstract

For verifying the specifications of ESCA (Electron Spectroscopy for Chemical Analysis) spectrometers, a test sample is prepared with a test area patterned to match the size of the expected X-ray beam/analysis area. The highly polished sample substrate may be made of a metal, such as Au, Cu or brass, onto which the test area is deposited (by sputtering or evaporation) as a thin film of a material, such as Ag, Al or C, using a suitable masking process. The mask opening can be cut by a focussed laser beam. A typical size of test area is 200 mm x 285 mm for a 45Πtake-off angle. As the ESCA signals from the test area and the sample material differ, any substrate signal indicates X-ray flux outside the specified test area and thus lateral deviations of the X-ray beam/analysis area caused by aberrations and the like.

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Determination of Lateral and Energy Resolution in Small-Spot ESCA Spectrometers

For verifying the specifications of ESCA (Electron Spectroscopy for Chemical Analysis) spectrometers, a test sample is prepared with a test area patterned to match the size of the expected X-ray beam/analysis area. The highly polished sample substrate may be made of a metal, such as Au, Cu or brass, onto which the test area is deposited (by sputtering or evaporation) as a thin film of a material, such as Ag, Al or C, using a suitable masking process. The mask opening can be cut by a focussed laser beam. A typical size of test area is 200 mm x 285 mm for a 45OE take-off angle. As the ESCA signals from the test area and the sample material differ, any substrate signal indicates X-ray flux outside the specified test area and thus lateral deviations of the X-ray beam/analysis area caused by aberrations and the like. The lateral resolution is determined by the intensity ratio of the ESCA signals of the test area material to the substrate material if the photoelectric cross-sections of the materials are similar (typical ratios are better than 6:1 for Ag: Cu). The exact choice of materials depends on the desired test sensitivity: samples comprising substrate materials with a high photoelectric cross-section and test area materials with a low photoelectric cross- section enhance the sensitivity for detecting X-ray flux outside the test area. The energy resolution is measured from full width h...