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Semi-Solidified Resist Remover

IP.com Disclosure Number: IPCOM000062434D
Original Publication Date: 1986-Nov-01
Included in the Prior Art Database: 2005-Mar-09
Document File: 2 page(s) / 44K

Publishing Venue

IBM

Related People

McCauley, JJ: AUTHOR

Abstract

In the photoresist processing of various products, the resist, after being developed, is stripped. It is typically stripped in a solution where resist settles in the process tank in a semi-solidified form, where it must be removed. A device for removing the resist works in the following manner. As seen in the drawing, the tool 1 is made of titanium and consists of opposing jaws 2 that pivot at point A. The tool removes resist by entering the process tank (not shown), to be cleaned, with the flat edges 3 of jaws 2 moving down on an X-axis on the side of the tank to be cleaned. As tool 1 lowers into the tank, it gathers resist until the resist solution reaches the top of edge 3 when the tool is closed by rotating opposing jaws 2 about point A until fully closed.

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Semi-Solidified Resist Remover

In the photoresist processing of various products, the resist, after being developed, is stripped. It is typically stripped in a solution where resist settles in the process tank in a semi-solidified form, where it must be removed. A device for removing the resist works in the following manner. As seen in the drawing, the tool 1 is made of titanium and consists of opposing jaws 2 that pivot at point A. The tool removes resist by entering the process tank (not shown), to be cleaned, with the flat edges 3 of jaws 2 moving down on an X-axis on the side of the tank to be cleaned. As tool 1 lowers into the tank, it gathers resist until the resist solution reaches the top of edge 3 when the tool is closed by rotating opposing jaws 2 about point A until fully closed. As jaws 2 close, the perforations 4 inside of the jaws (as seen in the side view), allow the solution to drain out as the tool is raised, leaving the captured resist. When the closed tool is fully raised, the resist is discarded and removal can continue. Handles 5 are designed to keep the user at a safe distance from the solution.

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