Browse Prior Art Database

Centrifuge Enhancement Tool

IP.com Disclosure Number: IPCOM000062465D
Original Publication Date: 1986-Nov-01
Included in the Prior Art Database: 2005-Mar-09
Document File: 2 page(s) / 30K

Publishing Venue

IBM

Related People

Devaney, BM: AUTHOR

Abstract

Contamination of semiconductor wafers is reduced by the use of a hand tool designed to tilt and lock a centrifuge wafer boat cradle such that it is no longer necessary for an operator to lean over the centrifuge during insertion or removal of wafers. The locking feature holds the cradle at the appropriate angle while the operator is free to use both hands to load or unload wafers. Single-handed loading, requiring the operator's gloved hand to be above the wafers, can also contribute to wafer contamination. Fig. 1 is a side view of the centrifuge wafer boat cradle. A wafer carrier (boat) is loaded and unloaded through the top of the cradle. Fig. 2 is the enhancement tool which is a demountable metal lever having a nylon lined socket 2 on its left hand end and a hand grip 4 on its right hand end.

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Centrifuge Enhancement Tool

Contamination of semiconductor wafers is reduced by the use of a hand tool designed to tilt and lock a centrifuge wafer boat cradle such that it is no longer necessary for an operator to lean over the centrifuge during insertion or removal of wafers. The locking feature holds the cradle at the appropriate angle while the operator is free to use both hands to load or unload wafers. Single-handed loading, requiring the operator's gloved hand to be above the wafers, can also contribute to wafer contamination. Fig. 1 is a side view of the centrifuge wafer boat cradle. A wafer carrier (boat) is loaded and unloaded through the top of the cradle. Fig. 2 is the enhancement tool which is a demountable metal lever having a nylon lined socket 2 on its left hand end and a hand grip 4 on its right hand end. The socket 2 is designed to fit snugly on carrier cradle handle 6 in Fig. 1. A C-shaped open hook (not shown) is mounted permanently on the centrifuge frame such that the enhancement tool handle may be inserted and held in the hook once the tool socket 2 has been engaged on carrier handle 6 and the enhancement tool has been depressed to rotate the carrier about pivot point 8 to a 30- degree angle from its initial vertical position. After a loading or unloading operation is complete, the enhancement tool is released from the hook and the tool handle is raised 30 degrees and disengaged from the cradle handle
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