Browse Prior Art Database

High Current Jet/Laser-Jet System for Plating and Etching

IP.com Disclosure Number: IPCOM000062693D
Original Publication Date: 1986-Dec-01
Included in the Prior Art Database: 2005-Mar-09
Document File: 2 page(s) / 41K

Publishing Venue

IBM

Related People

Von Gutfeld, RJ: AUTHOR

Abstract

Several experiments have shown successful plating of copper and gold using both a jet and a laser-jet system. However, the current capacity of the conventional jet system is limited in that a fairly high resistance path is produced by the anode-cathode spacing in combination with the small diameter jet emerging from the nozzle. The present system enables one to greatly increase the available current without resorting to high voltages by reducing the anode-cathode spacing in a novel way. In the present system, the anode-cathode distance is shortened by introducing the anode after the region of jet formation, i.e., after the nozzle. Preferably the nozzle is of the glass type rather than metal type because the glass nozzle results in a very much superior jet stream due to the smoothness of the glass bore.

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High Current Jet/Laser-Jet System for Plating and Etching

Several experiments have shown successful plating of copper and gold using both a jet and a laser-jet system. However, the current capacity of the conventional jet system is limited in that a fairly high resistance path is produced by the anode-cathode spacing in combination with the small diameter jet emerging from the nozzle. The present system enables one to greatly increase the available current without resorting to high voltages by reducing the anode- cathode spacing in a novel way. In the present system, the anode-cathode distance is shortened by introducing the anode after the region of jet formation,
i.e., after the nozzle. Preferably the nozzle is of the glass type rather than metal type because the glass nozzle results in a very much superior jet stream due to the smoothness of the glass bore. The anode is in the form of a diaphragm or metal cap, each with an aperture centered with respect to the nozzle. Requirements for this part are: the thickness must be small compared to the nozzle diameter, and the aperture should be somewhat smaller than the nozzle diameter. The smaller diameter allows the electrolyte to make good electrical contact with the metal part. By making the diameter just slightly smaller than that of the nozzle, a minimal perturbation of the flow and stability of the jet results. It is also now possible to introduce the standard anode and use the newly introduced electrode as a re...