Browse Prior Art Database

Multi-wafer Vacuum Carrier

IP.com Disclosure Number: IPCOM000062734D
Original Publication Date: 1986-Nov-01
Included in the Prior Art Database: 2005-Mar-09
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Hannah, JW: AUTHOR [+3]

Abstract

A proposal suggests the use of a vacuum instead of mechanical holddown clamps in carriers for transporting semiconductor wafers. The method makes it possible to carry different size wafers in the carrier as opposed to a single wafer carrier for each specific size.

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This is the abbreviated version, containing approximately 100% of the total text.

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Multi-wafer Vacuum Carrier

A proposal suggests the use of a vacuum instead of mechanical holddown clamps in carriers for transporting semiconductor wafers. The method makes it possible to carry different size wafers in the carrier as opposed to a single wafer carrier for each specific size.

In the multi-wafer carrier the wafer 1 would be placed on top of an O-ring 2 with a vacuum applied through a channel 3 appropriately equipped with a check valve 4. The carrier would have an appropriate cover 5, a cover O-ring 6 and cover locks 7.

Use of a vacuum would avoid any touching or scratching of the wafers and make it possible for them to be held in a vertical position.

Disclosed anonymously.

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