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Lpcvd Injector Alignment Tool

IP.com Disclosure Number: IPCOM000062738D
Original Publication Date: 1986-Nov-01
Included in the Prior Art Database: 2005-Mar-09
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Springer, LK: AUTHOR [+2]

Abstract

The LPCVD Injector Alignment Tool provides an accurate reference for both the lateral and rotational alignment of the quartz injectors in the LPCVD phosphosilicate glass system. Referring to Fig. 1, which is a front view of an LPCVD PSG system, two injector tubes 10 and 12 are illustrated. Each of these tubes includes a line of small injector orifices 14 along approximately one-half the length of the injector tubes 10 and 12.

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Lpcvd Injector Alignment Tool

The LPCVD Injector Alignment Tool provides an accurate reference for both the lateral and rotational alignment of the quartz injectors in the LPCVD phosphosilicate glass system. Referring to Fig. 1, which is a front view of an LPCVD PSG system, two injector tubes 10 and 12 are illustrated. Each of these tubes includes a line of small injector orifices 14 along approximately one-half the length of the injector tubes 10 and 12.

These injectors are removed from the system for cleaning about once each month. When they are replaced, their spacing and the rotational orientation of the orifices are critical to ensure the uniformity of the PSG film deposited on the wafers. Alignment ave to be made using a trial and error me adjustments have to be made using a trial and error method to optimize thickness uniformity.

The injector alignment tool 16 can be used instead of the costly and time consuming trial and error method. Tool 16 includes a quartz template 18 and long quartz handle 20 (Fig. 2). Quartz is used so that alignment checks can be made with the injector tubes hot (400 degrees C) and without contaminating the tube. Template 18 has cutouts 22 separated by spacing d, the injector spacing required. The template also includes alignment marks 24, used to set the rotational alignment of the injector orifices. With this tool, the lateral and rotational alignment of the injector tubes can be quickly and accurately set and maintained.

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