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Source Pin Removal Tool

IP.com Disclosure Number: IPCOM000062743D
Original Publication Date: 1986-Nov-01
Included in the Prior Art Database: 2005-Mar-09
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Harris, DL: AUTHOR

Abstract

In a typical metal evaporator, the source metal to be evaporated is contained in a source cup which is fixed in precise alignment to the evaporator filaments. The source cup is fastened to the apparatus with a source pin. The evaporator filaments are fragile and problems result when the source pin needs to be removed to replace the source cup. Under normal conditions, source pin replacement requires complete disassembly of the evaporator, to prevent any damage to the evaporator filaments, as the source pin's shape does not conform to normal socket type configuration. Upon reassembly of the evaporator, the gap between the filament and the source cup must be adjusted, which is a delicate and time consuming operation.

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Source Pin Removal Tool

In a typical metal evaporator, the source metal to be evaporated is contained in a source cup which is fixed in precise alignment to the evaporator filaments. The source cup is fastened to the apparatus with a source pin. The evaporator filaments are fragile and problems result when the source pin needs to be removed to replace the source cup. Under normal conditions, source pin replacement requires complete disassembly of the evaporator, to prevent any damage to the evaporator filaments, as the source pin's shape does not conform to normal socket type configuration. Upon reassembly of the evaporator, the gap between the filament and the source cup must be adjusted, which is a delicate and time consuming operation. Following this alignment, a continuity check is also performed and a series of dummy wafers are run to insure proper evaporation rate, thickness, etc.

The figure is a tool that conforms to the unusual shape of the source pin and allows its removal without endangering the filaments. Evaporator disassembly is no longer required and no filament adjustment or continuity checks are required.

Disclosed anonymously.

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